Line Scan-Based High-Speed Position Tracking Inside the SEM
Author:
Publisher
Informa UK Limited
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Instrumentation
Link
http://www.tandfonline.com/doi/pdf/10.1080/15599612.2010.484523
Reference13 articles.
1. A survey of CORDIC algorithms for FPGA based computers
2. Stick and slip actuators and parallel architectures dedicated to microrobotics
3. Active Release of Microobjects Using a MEMS Microgripper to Overcome Adhesion Forces
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