Structural, mechanical and corrosion properties of NbN films deposited using dc and pulsed dc reactive magnetron sputtering
Author:
Publisher
Informa UK Limited
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://www.tandfonline.com/doi/pdf/10.1179/026708409X363228
Reference32 articles.
1. The Chemistry of Transition Metal Carbides and Nitrides
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3. Mechanical properties and thermal stability of TiN∕TiB2 nanolayered thin films
4. The effect of the deposition rate on the properties of d.c.-magnetron-sputtered niobium nitride thin films
5. Improvements of performance on sputter-coated niobium films for superconducting cavities by adding a NbN interlayer
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