Monitoring Stress in Thin Films During Processing
Author:
Publisher
Informa UK Limited
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://www.tandfonline.com/doi/pdf/10.1179/026708403225010118
Reference33 articles.
1. The tension of metallic films deposited by electrolysis
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3. Extensions of the Stoney formula for substrate curvature to configurations with thin substrates or large deformations
4. Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history
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