Deposition of ZrNxOyfilms by filtered cathodic vacuum arc
Author:
Publisher
Informa UK Limited
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://www.tandfonline.com/doi/pdf/10.1179/1743294413Y.0000000163
Reference20 articles.
1. Preparation of ZrNxOy films by magnetron sputtering using air as a reactive gas
2. Structural evolution in ZrNxOy thin films as a function of temperature
3. Structural, electrical, optical, and mechanical characterizations of decorative ZrOxNy thin films
4. Nano-crystalline Zr2ON2 thin films deposited by reactive magnetron sputtering
5. Deposition of zirconium oxynitride films by reactive cathodic arc evaporation and investigation of physical properties
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1. Efficient silicon solar cells with highly conductive zirconium nitride electron-selective contacts;Applied Physics Letters;2023-03-13
2. Tunable sensitivity of zirconium oxynitride thin-film temperature sensor modulated by film thickness;Journal of Materials Science: Materials in Electronics;2022-08-27
3. Bias influence on titanium interlayer for titanium nitride films;Surface Engineering;2016-02-25
4. Breakdown field enhancement of Si-based MOS capacitor by post-deposition annealing of the reactive sputtered ZrOxNy gate oxide;Applied Physics A;2016-01-21
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