The Liga Process for Fabrication of Three-Dimensional Microscale Structures-Reference-Cited by-同舟云学术

The Liga Process for Fabrication of Three-Dimensional Microscale Structures

Published:1993-09 Issue:3 Volume:18 Page:267-272
ISSN:0308-0188
Container-title:Interdisciplinary Science Reviews
language:en
Short-container-title:Interdisciplinary Science Reviews

Author:

Bley P.

Publisher

Informa UK Limited

Subject

History and Philosophy of Science,Social Sciences (miscellaneous)

Link

http://www.tandfonline.com/doi/pdf/10.1179/isr.1993.18.3.267

Reference10 articles.

1. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

2. W. Ehrfeld: ‘The LIGA process for microsystems’, in ‘Micro system technologies 1990’, (ed. H. Reichl), 521–528; 1990, Heidelberg, Springer-Verlag.

3. P. Bley, J. Göttert, M. Harmening, M. Himmelhaus, W. Menz, J. Mohr, C. Müller and U. Wallrabe: ‘The LIGA-process for the fabrication of micromechanical and microoptical components’, in ‘Micro system technologies 1991’, (ed. H. Reichl), 302–314; 1991, Heidelberg, Springer-Verlag.

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