Research and industrial applications of key technologies of the manufacture of electronic chemicals for chips

Author:

Jin Rui-Hua,Yuan Xing,Li Qun-Sheng

Publisher

Science China Press., Co. Ltd.

Subject

Materials Chemistry,General Chemical Engineering,Biochemistry,General Chemistry

Reference18 articles.

1. Simultaneous distillation-extraction for manufacturing ultra-high-purity electronic-grade octamethylcyclotetrasiloxane (D4)

2. Liu Y, Su T, Dong H, Qu ZR, Wu C. Zhejiang Chemical Industry, 2021, 52: 23–27 (in Chinese) [刘阳, 苏腾, 董红, 瞿志荣, 伍川. 浙江化工, 2021, 52: 23–27].

3. Integrated UV-based photo microreactor-distillation technology toward process intensification of continuous ultra-high-purity electronic-grade silicon tetrachloride manufacture

4. Li Q, Chang Q, Wang B. Chemical Industry and Engineering Progress, 2007, 26: 204–206.

5. Li Q, Tian Y, Chang Q. Chemical Industry and Engineering Progress, 2007, 26: 201–203.

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