Integrated UV-based photo microreactor-distillation technology toward process intensification of continuous ultra-high-purity electronic-grade silicon tetrachloride manufacture-Reference-Cited by-同舟云学术

Integrated UV-based photo microreactor-distillation technology toward process intensification of continuous ultra-high-purity electronic-grade silicon tetrachloride manufacture

Published:2020-09 Issue:9 Volume:28 Page:2248-2255
ISSN:1004-9541
Container-title:Chinese Journal of Chemical Engineering
language:en
Short-container-title:Chinese Journal of Chemical Engineering

Author:

Wan Ye,Guo Wenhui,Xiao Jin,Yan Dazhou,Zhao Xiong,Guo Shuhu,Liu Jianhua,Zhong Qifan,Yang Tao,Zhao Yu,Chang Xin,Gao Xin

Funder

Ministry of Industry and Information Technology

Research and Development of Henan province

Publisher

Elsevier BV

Subject

General Chemical Engineering,General Chemistry,Biochemistry,Environmental Engineering

Reference26 articles.

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3. J.E. Lang, R. Nicolai, H. Rauleder. Reactor, plant and industrial process for the continuous preparation of high-purity silicon tetrachloride or high-purity germanium tetrachloride, US Pat 8574505 (2012).

4. Simulation and optimization of fiber grade silicon tetrachloride purification;Hu;Modern Chemical Industry,2013

5. Processes for the Purification of Trichlorosilane and Silicon Tetrachloride: US;Ghetti,2011

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