Synthesis of Co-silicides and fabrication of microwave power device using MEVVA source implantation

Author:

Zhang Tonghe,Wu Yuguang,Qian Weidong,Liu Yaodong,Zhang Xu

Publisher

Springer Science and Business Media LLC

Subject

General Engineering,General Materials Science

Reference7 articles.

1. Nicolet, M.-A., Lau, S. S. Formation and characterization of transition metal silicides, in VLSI Electronics. Microstructure Science, Chapter 6. New York: Academic Press, 1983, 368–372.

2. Tu, K. N., Mayer, J. W., Silicide formation, in Thin Film Interdiffusion and Reactions (eds. Poate, J. M., Tu, K. N., Mayer, J. W.), New York: The Electrochemical Society, 1978, 359.

3. Mantl, S., Ion beam synthesis of epitaxial silicides: fabrication, characterization and application, Material Science Report, 1992, 8: 1–95.

4. Zhang Tonghe, Wu Yuguang, Luo Yan, A new method of silicide formation by Ti and Y ion MEVVA implantation, in Proceeding of the Third Int. Conf. on Solid State and Integrated Circuit Technology, 1989, Beijing: Electron Industrial Press

5. Zhang Tonghe, Chen Jun, Sun Guiru, The formation of metallic silicides of Ti, Y, Fe, Mo and Wusing metal vapor vacuum arc implantation, Surface and Coating Technology, 1994, 66: 355.

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