Author:
Tonghe Zhang,Jun Chen,Guiru Sun,Yuguang Wu,Yan Luo,Xiaoji Ding,Yaojun Lin,Huixing Zhang
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference4 articles.
1. Silicides for VLSI Applications;Murarka,1983
2. Kinetics of TiSi2formation by thin Ti films on Si
3. Proc. 3rd Int. Conf. on Solid State and Integrated Circuit Technology;Zhang,1992
Cited by
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