Effect of Plate Materials on Sapphire Wafer Lapping Process
Author:
Publisher
Chinese Journal of Mechanical Engineering
Subject
Applied Mathematics,Computer Science Applications,Mechanical Engineering
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Study on the Friction and Wear Properties of Cast Iron Under Magnetic-Mechanical Coupling Conditions;Experimental Techniques;2024-06-04
2. Orthogonal experimental study on the influence of machining parameters on flat lapping of sapphire substrate;AIP Advances;2024-01-01
3. Cluster magnetorheological global dynamic pressure planarization processing of single crystal sapphire;The International Journal of Advanced Manufacturing Technology;2023-07-25
4. The full aperture processing technical research in fabricating large sapphire window element;Second Target Recognition and Artificial Intelligence Summit Forum;2020-01-31
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