DYNAMIC CHARACTERISTIC ANALYSIS OF PRECISE LONG STROKE LINEAR MOTOR WITH AIR-BEARING IN OPTICAL LITHOGRAPHY
Author:
Publisher
Chinese Journal of Mechanical Engineering
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review;International Journal of Mechanical System Dynamics;2021-09
2. Design and control of precision work stage with air bearing for large size optical grating fabrication;E3S Web of Conferences;2021
3. Optimization of Servo Parameters for Enhanced Dynamic Behavior of Direct Feed System with Hybrid FEM and PLS Regression;International Journal of Precision Engineering and Manufacturing;2018-11
4. Research on the Floating Motion Platform for Detecting Surface Defects in KDP Crystal;Materials Science Forum;2014-07
5. Estimation of Ultimate Limit Statefor Stiffened-Plates Structures: Applying for a Very Large Ore Carrier Structures Designed by IACS Common Structural Rules;Applied Mechanics and Materials;2012-12
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