Runtime Abstraction-Level Conversion of Discrete-Event Wafer-fabrication Models for Simulation Acceleration

Author:

Seok Moon GI1,Chan Chew Wye1,Cai Wentong1,Sarjoughian Hessam S.2,Park Daejin3

Affiliation:

1. Nanyang Technological University, Singapore, Singapore

2. Arizona State University, Tempe, AZ, USA

3. Kyungpook National University, Daegu, South Korea

Funder

Agency for Science Technology and Research (A*STAR) Singapore

Publisher

ACM

Reference18 articles.

1. Hierarchical Production Planning for Semiconductor Wafer Fabrication Based on Linear Programming and Discrete-Event Simulation;Bang J.;IEEE Transactions on Automation Science and Engineering,2010

2. Model simplification for accelerating simulation-based evaluation of dispatching rules in wafer fabrication facilities

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