Runtime Abstraction-Level Conversion of Discrete-Event Wafer-fabrication Models for Simulation Acceleration
Author:
Affiliation:
1. Nanyang Technological University, Singapore, Singapore
2. Arizona State University, Tempe, AZ, USA
3. Kyungpook National University, Daegu, South Korea
Funder
Agency for Science Technology and Research (A*STAR) Singapore
Publisher
ACM
Link
https://dl.acm.org/doi/pdf/10.1145/3384441.3395982
Reference18 articles.
1. Hierarchical Production Planning for Semiconductor Wafer Fabrication Based on Linear Programming and Discrete-Event Simulation;Bang J.;IEEE Transactions on Automation Science and Engineering,2010
2. Model simplification for accelerating simulation-based evaluation of dispatching rules in wafer fabrication facilities
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