Deep learning-based framework for comprehensive mask optimization-Reference-Cited by-同舟云学术

Deep learning-based framework for comprehensive mask optimization

Published:2019-01-21 Issue: Volume: Page:
ISSN:
Container-title:Proceedings of the 24th Asia and South Pacific Design Automation Conference
language:
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Author:

Yu Bo-Yi¹,Zhong Yong¹,Fang Shao-Yun¹,Kuo Hung-Fei¹

Affiliation:

1. National Taiwan University of Science and Technology, Taipei, Taiwan

Publisher

ACM

Link

https://dl.acm.org/doi/pdf/10.1145/3287624.3288749

Reference22 articles.

1. Kuan-Jung Chen Yu-Kai Chuang Bo-Yi Yu and Shao-Yun Fang "Minimizing cluster number with clip shifting in hotspot pattern classification " 2017 Design Automation Conference (DAC) pp. 1--6 2017. 10.1145/3061639.3062283 Kuan-Jung Chen Yu-Kai Chuang Bo-Yi Yu and Shao-Yun Fang "Minimizing cluster number with clip shifting in hotspot pattern classification " 2017 Design Automation Conference (DAC) pp. 1--6 2017. 10.1145/3061639.3062283

2. N. Cobb "Fast optical and process proximity correction algorithm for integrated circuit manufacturing " Ph.D. dissertation University of California at Berkeley 1998. N. Cobb "Fast optical and process proximity correction algorithm for integrated circuit manufacturing " Ph.D. dissertation University of California at Berkeley 1998.

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