Towards Big Data Visualization for Monitoring and Diagnostics of High Volume Semiconductor Manufacturing-Reference-Cited by-同舟云学术

Towards Big Data Visualization for Monitoring and Diagnostics of High Volume Semiconductor Manufacturing

Published:2017-05-15 Issue: Volume: Page:
ISSN:
Container-title:Proceedings of the Computing Frontiers Conference
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Author:

Gkorou Dimitra¹,Ypma Alexander¹,Tsirogiannis George¹,Giollo Manuel¹,Sonntag Dag¹,Vinken Geert¹,van Haren Richard¹,van Wijk Robert Jan¹,Nije Jelle¹,Hoogenboom Tom¹

Affiliation:

1. ASML, De Run, Veldhoven, the Netherlands

Publisher

ACM

Link

https://dl.acm.org/doi/pdf/10.1145/3075564.3078883

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