Nanowire-aware routing considering high cut mask complexity

Author:

Su Yu-Hsuan1,Chang Yao-Wen1

Affiliation:

1. National Taiwan University, Taipei, Taiwan

Funder

AnaGlobe, MediaTek, RealTek, TSMC, and MOST of Taiwan

Publisher

ACM

Reference16 articles.

1. Multiple patterning for immersion extension and EUV insertion;Bencher C.;Proc. Adv. Mat.,2013

2. Full-Chip Routing Considering Double-Via Insertion

3. Novel full-chip gridless routing considering double-via insertion

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3. Toward Unidirectional Routing Closure in Advanced Technology Nodes;IPSJ Transactions on System LSI Design Methodology;2017

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