Publisher
SHEI Ukrainian State University of Chemical Technology
Subject
Materials Chemistry,General Chemical Engineering,Environmental Chemistry,General Chemistry
Reference14 articles.
1. 1. Kim J.M., Dutta P.S., Brown E., Borrego J.M., Greiff P. Wet chemical etching process for wafer scale isolation and interconnection of GaSb based device layers grown on GaAs substrates. Journal of Vacuum Science & Technology B, 2013, vol. 31, article no. 031204.
2. 2. Orlov V.G., Sergeev G.S. Numerical simulation of the transport properties of indium antimonide. Physics of the Solid State, 2013, vol. 55, pp. 2215-2222.
3. 3. Perevoshchikov V.A. Protsessy khimiko-dinamicheskogo polirovaniya poverkhnosti poluprovodnikov [The processes of chemical dynamic polishing of semiconductor surfaces]. Vysokochistye Veshchestva, 1995, vol. 2, pp. 5-29. (in Russian).
4. 4. Aureau D., Chaghi R., Gerard I., Sik H., Fleury J., Etcheberry A. Wet etching of InSb surfaces in aqueous solutions: controlled oxide formation. Applied Surface Science, 2013, vol. 276, pp. 182-189.
5. 5. Kutty M.N., Plis E., Khoshakhlagh A., Myers S., Gautam N., Smolev S., Sharma Y.D., Dawson R., Krishna S., Lee S.J., Noh S.K. Study of surface treatments of InAs/GaSb superlattice LWIR detectors. Journal of Electronic Materials, 2010, vol. 39, pp. 2203-2209.
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献