Recent Developments of Field-Emission Research. Preparation of Electrically Conductive Diamond-Like Amorphous Carbon Films Suited for Field Emitters.
Author:
Affiliation:
1. Research Institute of Electronics, Shizuoka University
Publisher
Surface Science Society Japan
Subject
General Earth and Planetary Sciences,General Engineering,General Environmental Science
Link
http://www.jstage.jst.go.jp/article/jsssj/23/1/23_1_51/_pdf
Reference14 articles.
1. 1) 日経マイクロデバイス 7, 85 (2001).
2. Supermagnetron plasma chemical vapor deposition and qualitative analysis of electrically conductive diamond-like amorphous carbon films
3. 3) K. Sawada, H. Kinoshita, T. Masuda and M. Ishida: J. Vac. Sci. Technol. B 18, 1044 (2000).
4. Nitrogen containing hydrogenated amorphous carbon for thin‐film field emission cathodes
5. Low-voltage electron emission from “tipless” field emitter arrays
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