Feasibility of a New Atom Probe Specimen Preparation Method Using a Focused Ion Beam-Reference-Cited by-同舟云学术

Feasibility of a New Atom Probe Specimen Preparation Method Using a Focused Ion Beam

Author:

Mikami S.¹,Mayama N.¹,Iwata T.¹,Kaito T.²,Adachi T.²,Nojima M.³,Taniguchi M.⁴,Owari M.¹⁵

Affiliation:

1. Institute of Industrial Science, The University of Tokyo, Japan

2. SII Nanotechnology Inc., Japan

3. Research Institute of Science and Technology, Tokyo University of Science, Japan

4. Division of Applied Chemistry, Department of Bioengineering and Chemistry, Kanazawa Institute of Technology, Japan

5. Environmental Science Center, The University of Tokyo, Japan

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Link

Reference10 articles.

1. [1] M. K. Miller, Atom probe Tomography analysis at atomic level (Kluwer Academic / Plenum Publishers, New York, 2000).

3. [3] M. K. Miller, K. F. Russell, K. Thompson, R. Alvis, and D. J. Larson, Microsc. Microanal. 13, 428 (2007).

4. [4] A. Cerezo, P. H. Clifton, S. Lozano-Perez, P. Panayi, G. Sha, and G. D. W. Smith, Microsc. Microanal. 13, 408 (2007).

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