Affiliation:
1. Center for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University
2. National Institute of Advanced Industrial Science and Technology (AIST)
Publisher
Surface Science Society Japan
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology
Reference26 articles.
1. [1] R. F. Davis, J. Vac. Sci. Technol. A 11, 829 (1993).
2. [2] S. Dimitrijev and P. Jamet, Microelectron. Reliab. 43, 225 (2003).
3. [3] H. Matsunami and T. Kimoto, Mater. Sci. Eng. R 20, 125 (1997).
4. [4] I. Golecki, F. Reidinger, and J. Mart, Appl. Phys. Lett. 60, 1703 (1992).
5. [5] G. Krötz, W. Legner, G. Müller, H. W. Grueninger, L. Smith, B. Leese, A. Jones, and S. Rushworth, Mater. Sci. Eng. B 29, 154 (1995).
Cited by
14 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献