Affiliation:
1. CEA Leti MINATEC Campus, France
2. SIMaP, UMR 5266 CNRS/INPG/UJF, France
3. MATEIS, France
Publisher
Surface Science Society Japan
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology
Reference11 articles.
1. Structural, elastic, and high-pressure properties of cubic TiC, TiN, and TiO
2. Growth and mechanical anisotropy of TiN thin films
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5. Determination of elastic modulus of thin layers using nanoindentation
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