Reactions of 6H-SiC(0001) 3×3 surfaces with oxygen molecules at high temperature-Reference-Cited by-同舟云学术

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Reactions of 6H-SiC(0001) 3×3 surfaces with oxygen molecules at high temperature

Published:2003 Issue: Volume:1 Page:1-6
ISSN:1348-0391
Container-title:e-Journal of Surface Science and Nanotechnology
language:en
Short-container-title:e-J. Surf. Sci. Nanotechnol.

Author:

Hisada Yoshiyuki¹,Mitsuoka Yoshihito¹,Mukainakano Shinichi¹,Aoyama Tomohiro²,Ichimiya Ayahiko²

Affiliation:

1. DENSO CORPORATION

2. Department of Quantum Engineering, Nagoya University

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Link

http://www.jstage.jst.go.jp/article/ejssnt/1/0/1_0_1/_pdf

Reference24 articles.

1. Large‐band‐gap SiC, III‐V nitride, and II‐VI ZnSe‐based semiconductor device technologies

2. LEED and Auger electron observations of the SiC(0001) surface

3. Surface structure and composition of β- and 6H-SiC

4. Structural analysis of the heat-treated 4H(6H)-SiC(0001)Si surface

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Special Issue on Progress of Vacuum and Surface Science and Technology in the Early 21st Century— the 20th Anniversary of e-JSSNT —;Vacuum and Surface Science;2023-05-10

2. Thermal oxidation kinetics of an Si1−xCx alloy layer (x≃0.1) on Si(001) surfaces monitored in real time by RHEED combined with AES;Materials Science and Engineering: B;2006-12

3. Initial Oxidation of 6H-SiC (0001) (3 x 3)-R30° and 3 x 3 Surfaces Studied by AES and RHEED;Materials Science Forum;2004-06

4. Observations of Graphitized SiC Surfaces by STM;e-Journal of Surface Science and Nanotechnology;2004

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