Influence of the Shave-off Scan Speed on the Cross-Sectional Shape-Reference-Cited by-同舟云学术

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Influence of the Shave-off Scan Speed on the Cross-Sectional Shape

Published:2018-05-31 Issue:0 Volume:16 Page:214-217
ISSN:1348-0391
Container-title:e-Journal of Surface Science and Nanotechnology
language:en
Short-container-title:e-J. Surf. Sci. Nanotech.

Author:

Kang So-Hee¹,Kim Yun¹,Tomiyasu Bunbunoshin¹²,Owari Masanori¹²

Affiliation:

1. Institute of Industrial Science, University of Tokyo

2. Environmental Science Center, University of Tokyo

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Link

https://www.jstage.jst.go.jp/article/ejssnt/16/0/16_214/_pdf

Reference9 articles.

1. [1] H. Satoh, M. Owari, and Y. Nihei, J. Vac. Sci. Technol. B 6, 915 (1988). https://doi.org/10.1116/1.584322

2. [2] D. Santamore, K. Edinger, J. Orlff, and J. Melngailis, J. Vac. Sci. Technol. B 15, 2346 (1997). https://doi.org/10.1116/1.589643

3. [3] M. Fujii, K. Nakamura, Y. Ishizaki, M. Nojima, M. Owari, and Y. Nihei, Appl. Surf. Sci. 255, 1354 (2008). http://dx.doi.org/10.1016/j.apsusc.2008.05.022

4. [4] S. Kang, M. Furushima, H. Asakura, A. Habib, Y. Kim, B. Tomiyasu, and M. Owari, J. Surf. Anal. 24, 164 (2017).

5. [5] N. Vladov, J. Segal, and S. Ratchev, J. Vac. Sci. Technol. B 33, 041803 (2015). https://doi.org/10.1116/1.4926388

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1. Simulation of Secondary Ion Position on the Detector for Three-dimensional Shave-off Method;e-Journal of Surface Science and Nanotechnology;2020-04-02

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