Radical Production Processes on Heated Metal Catalyst Surfaces
Author:
Affiliation:
1. Faculty of Engineering, Shizuoka University
Publisher
Surface Science Society Japan
Subject
General Earth and Planetary Sciences,General Engineering,General Environmental Science
Link
http://www.jstage.jst.go.jp/article/jsssj/31/4/31_4_191/_pdf
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3. The influence of filament material on radical production in hot wire chemical vapor deposition of a-Si:H
4. 4) H. Umemoto, T. Morimoto, M. Yamawaki, Y. Masuda, A. Masuda and H. Matsumura: Thin Solid Films 430, 24 (2003).
5. Study of tungsten filament aging in hot-wire chemical vapor deposition with silacyclobutane as a source gas and the H2 etching effect
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