The influence of filament material on radical production in hot wire chemical vapor deposition of a-Si:H
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference37 articles.
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4. The Influence of W Filament Alloying on the Electronic Properties of Hwcvd Deposited a-Si:H Films
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