Platinum metallization for MEMS application
Author:
Publisher
Informa UK Limited
Subject
Biomedical Engineering,General Medicine,Biomaterials,Medicine (miscellaneous)
Link
http://www.tandfonline.com/doi/pdf/10.4161/biom.28822
Reference9 articles.
1. On the Growth of Fluorocarbon Thin Films Deposited on Plasma-Etched 316L Stainless Steel
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4. Methods to Investigate the Adhesion of Soft Nano-Coatings on Metal Substrates - Application to Polymer-Coated Stents
5. Development of a low-power thick-film gas sensor deposited by screen-printing technique onto a micromachined hotplate
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