New Sacrificial Layer-Based Screen-Printing Process for Free-Standing Thick-Films Applied to MEMS

Abstract

Thick-film sacrificial layers based on inorganic materials have been used for the fabrication of free-standing screen-printed films. A specific polymer ink based on a mixture of epoxy and strontium carbonate has been prepared for screen-printing of the sacrificial layer. After deposition and subsequent heat treatments of the structural and sacrificial layers, the latter is removed in an aqueous solution. The harmlessness and efficiency of the process have been demonstrated with regard to the structural layer(s). This new process, initially developed in our laboratory for the fabrication of a cantilever type beam, has been extended to the elaboration of an electrothermal actuator, constituted of two linked copper beams of different widths. The beams are partially suspended above the substrate to which they are anchored. Other developments include the fabrication of heating resistors and microchannels. Moreover, the process has been shown to facilitate the implementation of microassemblies such as piezoelectric transformers.