Design and characterization of Screen-Printed Piezoresistive Cantilever for Gas Sensor Application

Abstract

Abstract In this paper, the design, and the characterization of screen-printed cantilever-based humidity sensor are described. The project investigated in detail the sensitivity, and fabrication process of screen-printing based sensor with coated active humidity material on cantilever’s free end. The main aim of this paper is to compare the screen-printed technology with other existing technologies like micro-electro-mechanical system (MEMS), and low temperature cofired circuit (LTCC). The sensor has been simulated under different level of relative humidity with two different temperature value: 35°C, and 45°C. This paper also represents an analytical and mathematical modeling approach for frequency shift and thick film resistance change of the selected sensor. The analytical results are compared with the simulated results.