Study effect of incidence angle on ion implantation in ZnO matrix-Reference-Cited by-同舟云学术

Study effect of incidence angle on ion implantation in ZnO matrix

Published:2023-07-05 Issue:3 Volume:19 Page:345-349
ISSN:1584-9953
Container-title:Journal of Ovonic Research
language:
Short-container-title:JOR

Author:

Aissania H., ,Hami K.,Talhi A., ,

Abstract

The ion implantation method is one of the techniques used to dope the materials. The TRIM software (Transport and Range of Ions in Mater) created by Ziegler and colleagues [1] can simulate it. In this work, we studied the effect of incidence angles for different energies on the distribution of implant ions in the target by using the TRIM software, and several processes resulting from the interaction between Potassium ions and the target atoms are examined. Simulated physical effects are intriguing.

Publisher

Virtual Company of Physics

Subject

Surfaces, Coatings and Films,Physics and Astronomy (miscellaneous),Electronic, Optical and Magnetic Materials

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