Fused silica contamination layer removal using magnetic field‐assisted finishing-Reference-Cited by-同舟云学术

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Fused silica contamination layer removal using magnetic field‐assisted finishing

Published:2020-01-14 Issue:5 Volume:103 Page:3008-3019
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:J Am Ceram Soc

Author:

Long Julian¹^ORCID,Ross Daniel²,Tastepe Erik¹,Lamb Mikayla²,Funamoto Yusuke³,Shima Daichi³,Kamimura Tomosumi³,Yamaguchi Hitomi²

Affiliation:

1. Department of Materials Science and Engineering University of Florida Gainesville FL USA

2. Department of Mechanical and Aerospace Engineering University of Florida Gainesville FL USA

3. Department of Electronics, Information and Communication Engineering Osaka Institute of Technology Osaka Japan

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1111/jace.17000

Reference27 articles.

1. Effect of polishing process on silica surface laser-induced damage threshold at 355 nm

2. Enhancement of Surface-Damage Resistance by Removing Subsurface Damage in Fused Silica and Its Dependence on Wavelength

3. Evaluation of grinding-induced subsurface damage in optical glass BK7

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ultra-precision optical processing technology for large-aperture laser optics: Polishing path and technical parameter of arrayed magnetorheological finishing (AMRF);Optics & Laser Technology;2024-03

2. Research on the mitigation of redeposition defects on the fused silica surface during wet etching process;Optics Express;2024-02-26

3. Stable nanodepth and nanogram level material removal in electrochemically induced chemical etching of fused quartz;Precision Engineering;2024-01

4. Effect of Plasma Etching Depth on Subsurface Defects in Quartz Crystal Elements;Crystals;2023-10-11

5. Evolution of physical and mechanical properties of fused silica after subsurface damage layer removal by RIE treatment;Journal of Non-Crystalline Solids;2023-09

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