Study of SU‐8 photoresist cross‐linking process by atomic force acoustic microscopy-Reference-Cited by-同舟云学术

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Study of SU‐8 photoresist cross‐linking process by atomic force acoustic microscopy

Published:2019-12 Issue:3 Volume:276 Page:136-144
ISSN:0022-2720
Container-title:Journal of Microscopy
language:en
Short-container-title:Journal of Microscopy

Author:

ZHAO Y.¹²,LIU Y.¹²,WANG Z.¹²³^ORCID,WANG L.¹²,LI L.¹²,HOU F.¹²,SONG Z.¹²,WENG Z.¹²^ORCID

Affiliation:

1. Ministry of Education Key Laboratory for Cross‐Scale Micro and Nano ManufacturingChangchun University of Science and Technology Changchun China

2. International Research Centre for Nano Handling and Manufacturing of ChinaChangchun University of Science and Technology Changchun China

3. JR3CN & IRACUniversity of Bedfordshire Luton UK

Funder

H2020 Marie Skłodowska-Curie Actions

Ministry of Science and Technology

Publisher

Wiley

Subject

Histology,Pathology and Forensic Medicine

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1111/jmi.12848

Reference24 articles.

1. Novel three-dimensional embedded SU-8 microchannels fabricated using a low temperature full wafer adhesive bonding

2. Sensing in-plane nanomechanical surface and sub-surface properties of polymers: local shear stress as function of the indentation depth

3. Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings

4. 3D Micro- and Nanostructures via Interference Lithography

5. A novel dry method for surface modification of SU-8 for immobilization of biomolecules in Bio-MEMS

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Subsurface phase imaging of tapping‐mode atomic force microscopy at phase resonance;Journal of Microscopy;2022-07-23

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