Identification of electron beam vibration sources by separation of magnetic distortion from electric distortion on scanning electron microscope imaging

Author:

PLUSKA M.,CZERWINSKI A.,RATAJCZAK J.,KĄTCKI J.,OSKWAREK Ł.,RAK R.

Publisher

Wiley

Subject

Histology,Pathology and Forensic Medicine

Reference5 articles.

1. Measurement of magnetic field of magnetic recording head by a scanning electron microscope;Ishiba;Jap. J. Appl. Phys.,1974

2. Peng, K.C.E. , Pradeep, Y.E. & Phock, C.T. (2004) Image compensation device for a scanning electron microscope. US Patent, No. US6791083B2.

3. Elimination of scanning electron microscopy image periodic distortions with digital signal-processing methods;Płuska;J. Microsc.,2006

4. Pluska, M , Czerwinski, A ., Ratajczak, J. , Kątcki, J. , Oskwarek, Ł. & Rak, R. (2008) Separation of image-distortion sources and magnetic field measurement in scanning electron microscope (SEM). Micron, http://dx.doi.org/10.1016/j.micron.2008.01.009.

5. Vladar, A.E. (2003) Scanning electron microscopy in real world environment. http://www.nanobuildings.com

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1. Correction of image drift and distortion in a scanning electron microscopy;Journal of Microscopy;2015-09-14

2. Identification and reduction of acoustic-noise influence on focused ion beam (FIB);Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-04

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