Some recent developments in low voltage E-beam testing of ICs

Author:

Menzel E.,Buchanan R.

Publisher

Wiley

Subject

Histology,Pathology and Forensic Medicine

Reference64 articles.

1. Surface potential measurements on floating targets with a parallel beam technique;Brunner;J. Vac. Sci. Technol. B,1984

2. Simple calculation of energy distribution of low-energy secondary electrons emitted from metals under electron bombardment;Chung;J. appl. Phys.,1974

3. Crichton , G. Fazekas , P. Wolfgang , E. 1980 Electron beam testing of microprocessors IEEE Test Conference 444 449

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