Rapid Microwave Annealing of Amorphous Lead Zirconate Titanate Thin Films Deposited by Sol-Gel Method on LaNiO3 /SiO2 /Si Substrates-Reference-Cited by-同舟云学术

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Rapid Microwave Annealing of Amorphous Lead Zirconate Titanate Thin Films Deposited by Sol-Gel Method on LaNiO3 /SiO2 /Si Substrates

Published:2012-11-09 Issue:1 Volume:96 Page:90-95
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:J. Am. Ceram. Soc.

Author:

Chen Y. N.¹,Wang Z. J.¹

Affiliation:

1. Shenyang National Laboratory for Materials Science; Institute of Metal Research; Chinese Academy of Sciences; 72 Wenhua Road Shenyang 110016 China

Funder

National Natural Science of foundation of China

National Basic Research Program

Research Program of Science and Technology of Shenyang City of China

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/jace.12066/fullpdf

Reference30 articles.

1. Application of Modern Ferroelectrics;Scott;Science,2007

2. Recent Progress in Materials Issues for Piezoelectric MEMS;Muralt;J. Am. Ceram. Soc.,2008

3. Novel Multibridge-Structured Piezoelectric Microdevice for Scanning Force Microscopy;Chu;J. Vac. Sci. Technol.,2000

4. Preparation and Application of Lead Zirconate Titanate (PZT) Films Deposited by Hybrid Process: Sol-Gel Method and Laser Ablation;Tsaur;Jpn. J. Appl. Phys.,2002

5. Low-Temperature Growth of High-Quality Lead Zirconate Titanate Thin Films by 28 GHz Microwave Irradiation;Wang;Appl. Phys. Lett.,2005

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