Measurement of Steep Surfaces Using White Light Interferometry
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1475-1305.2008.00595.x/fullpdf
Reference9 articles.
1. Profilometry with a coherence scanning microscope;Lee;Appl. Opt.,1990
2. Surface profiling by analysis of white-light interferograms in the spatial frequency domain;de Groot;J. Modern Opt.,1995
3. Image formation in low-coherence and confocal interference microscopes;Sheppard;Appl. Opt.,2004
4. Microscope interférentiel A Mirau pour la mesure du fini des surfaces;Delaunay;Rev. Opt. Theor. Instrum.,1953
5. Surface measurement errors using commercial scanning white light interferometers;Gao;Meas. Sci. Technol.,2008
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