Determination of the True Young's Modulus of Pb(Zr0.52Ti0.48)O3 Films by Nanoindentation: Effects of Film Orientation and Substrate
Author:
Affiliation:
1. Materials Research and Education Center; Department of Mechanical Engineering, Auburn University; Auburn, AL; 36849
2. Divison of Engineering; Brown University; Providence, RI; 02912
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1551-2916.2011.04867.x/fullpdf
Reference25 articles.
1. Micromachined PZT Cantilever Based on SOI Structure for Low Frequency Vibration Energy Harvesting;Shen;Sens. Actuators, A,2009
2. Mechanical Properties Determined by Nanoindentation Tests of [Pb(Zr,Ti)O3] and [Pb(Mg1/3Nb2/3)1-xTixO3] Sputtered Thin Films;Delobelle;Thin Solid Films,2006
3. True Young Modulus of Pb(Zr,Ti)O3 Films Measured by Nanoindentation;Delobelle;Appl. Phys. Lett.,2004
4. Indentation Modulus and Hardness of Pb(Zr, Ti)O3 Sol-Gel Films Deposited on Pt and LaNiO3 Electrodes. An Estimation of the CijD Compliances;Delobelle;J. Eur. Ceram. Soc.,2007
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