Characterization of the Polishing-Induced Contamination of Fused Silica Optics-Reference-Cited by-同舟云学术

Characterization of the Polishing-Induced Contamination of Fused Silica Optics

Published:2016-09-15 Issue:1 Volume:100 Page:96-107
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:J. Am. Ceram. Soc.

Author:

Pfiffer Mathilde¹,Longuet Jean-Louis²,Labrugère Christine³,Fargin Evelyne⁴,Bousquet Bruno⁵,Dussauze Marc⁶,Lambert Sébastien²,Cormont Philippe¹,Néauport Jérôme¹

Affiliation:

1. Commissariat à l'Energie Atomique et aux Energies Alternatives; Centre d'Etudes Scientifiques et Techniques d'Aquitaine; BP2 33114 Le Barp France

2. Commissariat à l'Energie Atomique et aux Energies Alternatives, Le Ripault; BP16 37260 Monts France

3. Plateforme Aquitaine de Caractérisation des Matériaux, UMS3626; 33608 Pessac France

4. Institut de Chimie de la Matière Condensée de Bordeaux; 33608 Pessac France

5. Centre d'Etudes des Laser Intenses et Applications; UMR 5107 CNRS; Université de Bordeaux, CEA; 33405 Talence France

6. Institut des Sciences Moléculaires; UMR 5255 CNRS; 33405 Talence France

Funder

Agence Nationale de la Recherche

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/jace.14448/fullpdf

Reference28 articles.

1. Near Surface Modification of Silica Structure Induced by Chemical/Mechanical Polishing;Trogolo;J. Mater. Sci.,1994

2. Analysis of Surface Layers;Bach;SPIE,1983

3. Chemistry and Formation of the Beilby Layer During Polishing of Fused Silica Glass;Suratwala;J. Am. Ceram. Soc.,2015

4. Advanced Surface Analysis of Silicate Glasses, Oxides and Other Insulating Materials: A Review;Bach;J. Non-Cryst. Solids,1997

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