Transparent and Scratch-Resistant C:ZrOx Coatings on Polymer and Glass by Plasma-Enhanced Chemical Vapor Deposition

Author:

Mathur Sanjay,Ruegamer Thomas

Publisher

Wiley

Subject

Materials Chemistry,Marketing,Condensed Matter Physics,Ceramics and Composites

Reference27 articles.

1. Synthesis, Structure, Microstructure and Mechanical Characteristics of MOCVD Deposited Zirconia Films;Bernard;Appl. Surf. Sci.,2007

2. Tuning the Electrical Properties of Zirconium Oxide Thin Films;Cho;Appl. Phys. Lett.,2002

3. Electrical, Optical and Structural Characterization of High-k Dielectric ZrO2 Thin Films Deposited by the Pyrosol Technique;Reyna-Garcia;J. Mater. Sci.: Mater. Electron.,2004

4. Refractive Index Adjustment of SiO2 Gel Glass with Zirconium Oxychloride;Hua;J. Sol-Gel Sci. Technol.,2005

5. Chemical Vapor Deposition of MgAl2O4 Thin Films Using Different Mg-Al Alkoxides;Mathur;Role of Precursor Chemistry,2004

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