Silicon Nitride Oxidation Based on Oxynitride Interlayers with Graded Stoichiometry
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.1996.tb08742.x/fullpdf
Reference14 articles.
1. Oxidation Studies of Crystalline CVD Silicon Nitride
2. Evidence from Transmission Electron Microscopy for an Oxynitride Layer in Oxidized Si3 N 4
3. Role of Si2N2O in the Passive Oxidation of Chemically-Vapor-Deposited Si3N4
4. Corrosion of Silicon-Based Ceramics in Combustion Environments
5. Thermodynamics of the Si‐N‐O System and Kinetic Modeling of Oxidation of Si3 N 4
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