Role of Si2N2O in the Passive Oxidation of Chemically-Vapor-Deposited Si3N4
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.1992.tb04377.x/fullpdf
Reference27 articles.
1. Oxidation Studies of Crystalline CVD Silicon Nitride
2. Isotopic Studies of Oxidation of Si3 N 4 and Si using SIMS
3. Thermodynamics of the Si‐N‐O System and Kinetic Modeling of Oxidation of Si3 N 4
4. Evidence from Transmission Electron Microscopy for an Oxynitride Layer in Oxidized Si3 N 4
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