Effect of Nitridation Rate on the Composition and Conductivity of Titanium Nitride Films Prepared from Sol-Gel Titania
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.1991.tb06869.x/fullpdf
Reference22 articles.
1. Chemical vapour deposition of corrosion-resistant TiN film to the inner walls of long steel tubes
2. Nitrogen, oxygen, and argon incorporation during reactive sputter deposition of titanium nitride
3. Synthesis of titanium nitrides by activated reactive evaporation
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