1. P. J. M. Van Der Straten andG. Verspui,Philips Tech. Rev. 40 (1982) 204.
2. C. H. J. Van Der Brekel, R. M. Fonville, P. J. M. Van Der Straten andG. Verspui, Proceedings of the 8th International Conference on Chemical Vapour Deposition, Gouvieux, 1981 (Electrochemical Society, New Jersey, 1981) p. 142.
3. H. Itoh, M. Gonda andK. Sugiyama,Kinzoku Hyomen Gijutsu 35 (1984) 590.