Thermodynamic Analysis and Kinetic Implications of Chemical Vapor Deposition of Sic from Si-C-C1-H Gas Systems
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.1985.tb15295.x/fullpdf
Reference18 articles.
1. Growth Characteristics of Alpha-Silicon Carbide
2. Zur Thermodynamik des Systems Si–C–Cl–H und Darstellung von phasenreinem SiC
3. Thermodynamic Calculations for the Chemical Vapor Deposition of Silicon Carbide
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