About the information depth of backscattered electron imaging-Reference-Cited by-同舟云学术

About the information depth of backscattered electron imaging

Published:2017-03-01 Issue:3 Volume:266 Page:335-342
ISSN:0022-2720
Container-title:Journal of Microscopy
language:en
Short-container-title:Journal of Microscopy

Author:

PIŇOS J.¹,MIKMEKOVÁ Š.¹,FRANK L.¹

Affiliation:

1. Group of Microscopy and Spectroscopy of Surfaces, Department of Electron Microscopy, Institute of Scientific Instruments of the CAS; Brno Czech Republic

Publisher

Wiley

Subject

Histology,Pathology and Forensic Medicine

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/jmi.12542/fullpdf

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3. Imaging and analysis of subsurface Cu interconnects by detecting backscattered electrons in the scanning electron microscope;Gignac;J. Appl. Phys,2005

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