Effect of laser parameters and atmosphere in the structuring of aluminum nitride-Reference-Cited by-同舟云学术

Effect of laser parameters and atmosphere in the structuring of aluminum nitride

Published:2022-09-05 Issue:6 Volume:19 Page:3040-3048
ISSN:1546-542X
Container-title:International Journal of Applied Ceramic Technology
language:en
Short-container-title:Int J Applied Ceramic Tech

Author:

Shao Jing¹²^ORCID,Dong Hao¹²,Zhang Ruolan²³,Wang Yingming¹²,Han Suli¹²

Affiliation:

1. Key Lab of Industrial Fluid Energy Conservation and Pollution Control Qingdao University of Technology Qingdao China

2. Shandong Collaborative Innovation Center of Laser Green Intelligent Manufacturing Technology and Equipment Qingdao University of Technology Qingdao China

3. Shandong Energy Heavy Equipment Manufacturing Group Co. Ltd Taian China

Funder

Key Technology Research and Development Program of Shandong

China Postdoctoral Science Foundation

National Natural Science Foundation of China

Publisher

Wiley

Subject

Materials Chemistry,Marketing,Condensed Matter Physics,Ceramics and Composites

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1111/ijac.14176

Reference19 articles.

1. Enhanced mechanical and thermal properties of AlN ceramics via a chemical precipitation process

2. A comparison of the thermal decomposition mechanism of wurtzite AlN and zinc blende AlN

3. Improving quality and machining efficiency of hole during AlN trepanning with nanosecond pulse laser

4. Surface failure mode evaluation of pure AlN and AlN with Al2O3(0.1 μm) oxide layer by microscratch testing

5. Study of copper thick film metallization on aluminum nitride

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