Surface failure mode evaluation of pure AlN and AlN with Al2O3(0.1 μm) oxide layer by microscratch testing-Reference-Cited by-同舟云学术

Surface failure mode evaluation of pure AlN and AlN with Al2O3(0.1 μm) oxide layer by microscratch testing

Published:2005-08-25 Issue:21 Volume:40 Page:5703-5710
ISSN:0022-2461
Container-title:Journal of Materials Science
language:en
Short-container-title:J Mater Sci

Author:

Chouanine Lotfi,Takano Masayuki,Ashihara Fumio,Kamiya Osamu

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/s10853-005-0946-7.pdf

Reference22 articles.

1. P. R. CHOUDHURY, “Handbook of Microlithography, Micromachining, and Microfabrication” Vol. 1 (The Society of Photo-Optical Instrumentation Engineers, Washington, 1997) p.11.

2. Idem., ibid. Vol. 2 (The Society of Photo-Optical Instrumentation Engineers, 1997) p. 3.

3. D. W. RICHERDSON, “Modern Ceramic Engineering: Properties, Processing, and Use in Design,” 2nd edition (Marcel Dekker, New York, 1992) p. 374.

4. T. ABRAHAM and W. DAVIDSON, “GB-163 Near Net Shape Manufacturing of Advanced Ceramics” (1995) 64.

5. J. C. LAMBROPOULOS, S. D. JACOBS, B. GILLMAN, F. YANG and J. RUCKMAN, in Proceedings of the 5th Inter. Conf. on Advances in the Fusion and Processing of Glass, Vol. 82 (Ceramic Transactions, 1998) p. 469.

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