Tactile Sensor with Microcantilevers Embedded in Fluoroelastomer/PDMS for Physical and Chemical Resistance
Author:
Affiliation:
1. Niigata University
2. College of Information Science and Engineering, Ritsumeikan University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/142/5/142_91/_pdf
Reference11 articles.
1. (1) Ministry of Health, Labour and Welfare, Japan, Annual Health, Labour and Welfare Report 2017 (2017)
2. (2) H. Shinoda : “Tactile Sensing for Dexterous Hand”, J. Robot. Soc. Jpn. 18, No. 6, pp. 767-771 (2000)
3. (3) H. Yokoyama, G. Kanashima, M. Okuyama, T. Abe, H. Noma, T. Azuma, and M. Sohgawa : “Proximity and Tactile Sensing Using a Single MEMS Sensor with Photo- and Strain Sensitivities”, IEEJ Trans Series E, Vol. 134, No. 7, pp. 229-234 (2014)
4. (4) M. Sohgawa, A. Nozawa, H. Yokoyama, T. Kanashima, M. Okuyama, T. Abe, H. Noma, and T. Azuma : “Multimodal measurement of proximity and touch force by light- and strain-sensitive multifunctional MEMS sensor”, IEEE Sensors 2014 Proc., pp. 1749-1752, Valencia, Spain (2014)
5. (5) T. Takahashi, et al.: “Tactile sensor using a microcantilever embedded in fluoroelastomer with resistance to cleaning and antiseptic solutions”, Sens. Actuators A, 301, 111774 (2020)
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