Sensitivity of Micro Cantilever Mass Sensor Transduced by PZT Film
Author:
Affiliation:
1. Networked MEMS Technology Group, National Institute of Advanced Industrial Science and Technology (AIST)
2. Future Creation Lab., Olympus Corporation
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://www.jstage.jst.go.jp/article/ieejsmas/127/3/127_3_126/_pdf
Reference24 articles.
1. (1) S. Dohn, R. Sandberg, W. Svendsen, and A. Boisen : “Enhanced functionality of cantilever based mass sensor using higher modes”, Appl. Phys. lett., Vol. 86, 233501 (2005)
2. Micromechanical oscillators as rapid biosensor for the detection of active growth of Escherichia coli
3. Fabrication and application of polymer coated cantilevers as gas sensors
4. Ultrasensitive nanoelectromechanical mass detection
5. Frequency modulation detection using high‐Qcantilevers for enhanced force microscope sensitivity
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