Sputter Deposition of YSZ Epitaxial Buffer Layer at Wafer Level for Piezoelectric MEMS Utilizing PZT-based Monocrystalline Thin Film
Author:
Affiliation:
1. Shuji Tanaka Lab., Department of Bioengineering and Robotics, Tohoku University
2. Yokohama City University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/136/10/136_437/_pdf
Reference7 articles.
1. (1) H. Funakubo, M. Dekkers, A. Sambri, S. Gariglio, I. Shklyarevskiy, and G. Rijnders : “Epitaxial PZT films for MEMS printing applications”, MRS Bulletin, Vol. 37, pp. 1030-1038 (2012)
2. (2) S. Trolier-McKinstry and P. Muralt : “Thin Film Piezoelectrics for MEMS”, Journal of Electroceramics, Vol. 12, pp. 7-17 (2004)
3. (3) S. Tadigadapa and K. Mateti : “Piezoelectric MEMS sensors: state-of-the-art and perspectives”, Measurement Science and Technology, Vol. 20, p. 092001 (2009)
4. (4) S. Yoshida, H. Hanzawa, K. Wasa, M. Esashi, and S. Tanaka : “Highly c-axis-oriented monocrystalline Pb(Zr,Ti)O3 thin films on Si wafer prepared by fast cooling immediately after sputter deposition”, IEEE Trans Ultrason. Ferroelectr. Freq. Control., Vol. 61, pp. 1552-1558 (2014)
5. (5) H. Hanzawa, S. Yoshida, K. Wasa, and S. Tanaka : “Highly c-Axis Oriented Monocrystalline Pb(Zr,Ti)O3 based Thin Film on Si Wafer by Sputter Deposition with Fast Cooling Process”, The Proceedings of IEEE International Ultrasonic Symposium pp. 907-910 (2014)
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1. Piezo Device 2.0;The Journal of The Institute of Electrical Engineers of Japan;2024-02-01
2. MEMS Using Epitaxial PZT Family;2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF);2023-07-23
3. Sputter deposition and characterization of “epi-poly” Pb(Zr, Ti)O3 thin film on (100) Si substrate for MEMS applications;Japanese Journal of Applied Physics;2021-09-24
4. Development of buffer layer structure for epitaxial growth of (100)/(001)Pb(Zr,Ti)O3-based thin film on (111)Si wafer;Japanese Journal of Applied Physics;2017-06-26
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