Fabrication of Metallic Microneedle by Electroplating and Sharpening of it by Electrochemical Etching

Author:

Huang Chih-hao1,Tanaka Takahiro1,Takaoki Yutaka1,Izumi Hayato2,Takahashi Tomokazu1,Suzuki Masato1,Aoyagi Seiji1

Affiliation:

1. Kansai University

2. Nagoya Institute of Technology

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Reference21 articles.

1. (1) S. Henry, D. V. McAllister, M. G. Allen, and M. R. Prausnitz : “Micromachined Needles for the Transdermal Delivery of Drugs, Proc. MEMS”, Proc. MEMS'98, pp. 494-498 (1998)

2. A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array

3. (3) P. Griss, P. Enoksson, K. T. Laakso, P. Merilainen, S. Ollmar, and G. Stemme : “Spiked biopotential electrodes”, Proc. MEMS'00, pp. 323-328 (2000)

4. (4) M. Shikida, M. Ando, Y. Ishihara, N. Yamaura, T. Ando, K. Sato, and K. Asaumi : “Fabrication of Pen-Shaped Microneedle Structure by using Non-Photolithographic Pattern Transfer”, Proc. Transducers'03, pp. 1671-1674 (2003)

5. (5) D. V. McAllister, F. Cross, S. P. Davis, L. M. Matta, M. R. Prausnitz, and M. G. Allen : “Three-Dimensional Hollow Microneedle and Microtube Arrays”, Proc. Transducers '99, pp. 1098-1101 (1999)

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