Smart Bio Chip -Fusion of Integrated Circuits Technology and Sensor Technology-
Author:
Affiliation:
1. Toyohashi University of Technology
2. Electronics-Inspired Interdisciplinary Research Institute (EIIRIS)
3. JST-CREST
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://www.jstage.jst.go.jp/article/ieejsmas/131/10/131_10_344/_pdf
Reference14 articles.
1. Fabrication and properties of ultrasmall Si wire arrays with circuits by vapor–liquid–solid growth
2. (2) T. Kawano, H. Takao, K. Sawada, and M. Ishida : “Multichannel 5 × 5-site 3-dimensional Si micro-probe electrode array for neural activity recording”, Japanese Journal of Applied Physics, Vol.42, Part 1, No.4B, pp.2473-2477 (2003-4)
3. Selective Vapor-Liquid-Solid Epitaxial Growth of Micro-Si Probe Electrode Arrays With On-Chip MOSFETs on Si
4. Electrical interfacing between neurons and electronics via vertically integrated sub-4μm-diameter silicon probe arrays fabricated by vapor–liquid–solid growth
5. (5) A. Ikedo, T. Kawashima, T. Kawano, and M. Ishida : “Vertically aligned silicon microwire arrays of various lengths by repeated selective vapor-liquid-solid growth of n-type silicon/n-type silicon”, Applied Physics Letters, Vol.95, 033502 (2009-7)
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